A new method is proposed for determining the degree of roughness of a solid surface using the phenomenon of multiple X-ray total external reflection from the walls of a band-shaped waveguide. It is shown that the angular dependence of the waveguide transmission coefficient is more sensitive to the root-mean-square height of roughness than the curve of the single reflection coefficient. The dependence of the transmission coefficient on the X-ray guide parameters is analyzed.
Department of Solid-State Physics, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia
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