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Structure of catho de sputtered thin films

A.I. Krokhina, V.S. Azarov, and L. Ettemadi

Moscow University Physics Bulletin 1971. 26. N 2. P. 95

  • Article

Rissian citation:
А.И. Крохина, В.С. Азаров, Л. Эттемади.
О структуре тонких пленок -осадков, полученных катодным распылением.
Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 1971. № 2. С. 230.
Authors
A.I. Krokhina, V.S. Azarov, and L. Ettemadi
Department of Electronics
Issue 2, 1971

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