Regular Article

Simulation of back and transmission sputtering of atoms under the ion bombardment of single-crystal and quasiamorphous two-component targets

V.N. Samoilov, V.A. El'tekov, B. Fritzsch, N.G. Anan'eva

Moscow University Physics Bulletin 1987. 42. N 6. P. 72

Article

Annotation

A dynamic model of a block of atoms is used to compare the sputtering parameters of two-component single-crystal and amorphous targets. The simulation is performed for the case of ion bombardment of the (0001) plane of VSi$_2$ single crystal and a corresponding quasiamorphous target with Ne$^+$ ions with energies of 10 keV, incident normally.

Authors

V.N. Samoilov, V.A. El'tekov, B. Fritzsch, N.G. Anan'eva
Department of General Physics for the Physics Faculty, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia

Issue 6, 1987

Moscow University Physics Bulletin

Science News of the Faculty of Physics, Lomonosov Moscow State University

This new information publication, which is intended to convey to the staff, students and graduate students, faculty colleagues and partners of the main achievements of scientists and scientific information on the events in the life of university physicists.