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Simulation of back and transmission sputtering of atoms under the ion bombardment of single-crystal and quasiamorphous two-component targets

V.N. Samoilov, V.A. El'tekov, B. Fritzsch, N.G. Anan'eva

Moscow University Physics Bulletin 1987. 42. N 6. P. 72

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Annotation

A dynamic model of a block of atoms is used to compare the sputtering parameters of two-component single-crystal and amorphous targets. The simulation is performed for the case of ion bombardment of the (0001) plane of VSi$_2$ single crystal and a corresponding quasiamorphous target with Ne$^+$ ions with energies of 10 keV, incident normally.

Rissian citation:
В.Н. Самойлов, В.А. Эльтеков, Б. Фритч, Н.Г. Ананьева.
Моделирование распыления атомов компонент назад и на прострел при ионной бомбардировке монокристаллической и квазиаморфной двухкомпонентных мишеней.
Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 1987. № 6. С. 65.
Authors
V.N. Samoilov, V.A. El'tekov, B. Fritzsch, N.G. Anan'eva
Department of General Physics for the Physics Faculty, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia
Issue 6, 1987

Moscow University Physics Bulletin

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