Faculty of Physics
M.V.Lomonosov Moscow State University
Regular Article

Simulation of back and transmission sputtering of atoms under the ion bombardment of single-crystal and quasiamorphous two-component targets

V.N. Samoilov, V.A. El'tekov, B. Fritzsch, N.G. Anan'eva

Moscow University Physics Bulletin 1987. 42. N 6. P. 72

  • Article

A dynamic model of a block of atoms is used to compare the sputtering parameters of two-component single-crystal and amorphous targets. The simulation is performed for the case of ion bombardment of the (0001) plane of VSi$_2$ single crystal and a corresponding quasiamorphous target with Ne$^+$ ions with energies of 10 keV, incident normally.

Rissian citation:
В.Н. Самойлов, В.А. Эльтеков, Б. Фритч, Н.Г. Ананьева.
Моделирование распыления атомов компонент назад и на прострел при ионной бомбардировке монокристаллической и квазиаморфной двухкомпонентных мишеней.
Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 1987. № 6. С. 65.
V.N. Samoilov, V.A. El'tekov, B. Fritzsch, N.G. Anan'eva
Department of General Physics for the Physics Faculty, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia
Issue 6, 1987

Moscow University Physics Bulletin

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