Microstructure of sputter-deposited multilayer Ta/Al films with superlattice

X-ray diffraction and electron microscopy have revealed that in deposition of multilayer Ta/Al films onto glass substrates, the near-substrate layer has an amorphous structure, while subsequent crystalline layers of Ta and Al exhibit a planar axial texture. The films show the presence of a superlattice with a period of 72 A. After annealing at 550°C, the two-layer microstructure transforms to a four-layer one.