Brief Report

The effect of electrophysical parameters on spatial resolution of scanning electron microscope operating in the induced current mode

R.S. Gvozdover V.I. Petrov

Moscow University Physics Bulletin 1993. 48. N 2. P. 69

Article

Annotation

This paper considers the effect of the surface recombination rate and the depth of source on the spatial resolution of a scanning electron microscope operating in the induced current mode for objects with p-n junctions located perpendicular to the electron beam scanning plane.

Authors

R.S. Gvozdover V.I. Petrov
Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119991, Russia

Issue 2, 1993

Moscow University Physics Bulletin

Science News of the Faculty of Physics, Lomonosov Moscow State University

This new information publication, which is intended to convey to the staff, students and graduate students, faculty colleagues and partners of the main achievements of scientists and scientific information on the events in the life of university physicists.