Annotation
This paper considers the effect of the surface recombination rate and the depth of source on the spatial resolution of a scanning electron microscope operating in the induced current mode for objects with p-n junctions located perpendicular to the electron beam scanning plane.
© 2016 Publisher M.V.Lomonosov Moscow State University
Authors
R.S. Gvozdover V.I. Petrov
Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119991, Russia
Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119991, Russia
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