Energy distribution of electrons in near-electrode plasma of low-pressure HF capacity discharge

To study the electron energy spectrwn in the plasma of a low-pressure capacity HF discharge in Xe and He, a charged particle energy analyzer was used. The mechanisms of the plasma electron energy spectrum formation, which include the near-electrode electron beams, were analyzed. The anomalous heating of electrons in Xe plasma was shown to be induced by the beam-plasma instability. The sharp decrease of plasma electron heating with increasing HF voltage was revealed, as the Ramsauer effect manifestation.