Structural ordering and self-organization effects in multilayer Pd/Fe films

The structural features of the distribution of Pd and Fe atoms in multilayer films derived via Penning-discharge sputtering are studied. The preparation of films is a highly nonequilibrium process; at the same time, it is relatively simple in terms of possible structural implementations, which are shown during the self-organization of sputtered atoms through the formation of clusters with an individual ordered structure. It is important that the “dynamic chaos” that appears during sputtering is stabilized during crystallization, which makes it possible to study the resulting structures using nondestructive inspection methods with fairly wide possibilities. Therefore, it is of interest to study self-organization during the sputtering of multilayer films in order to reveal the mechanisms of cluster formation and to simulate them. It is also shown that the self-organization during sputtering and subsequent crystallization is accompanied not only by the ordering in the form of clusters, buts also by an ordered arrangement of these clusters.