A physical model of thermally induced processes of diffusion and phase formation in layered metal-metalloid systems is offered. The software for the model is created, which allows one to quantitatively describe the kinetics of these processes under arbitrary modes of annealing. The results of theoretical computations are compared with the data of experimental studies of a $^{57}$Fe:O$^{+}$ layered implantation system using the methods of Mössbauer spectroscopy. The agreement between the numerical and experimental results indicates that the nature of phase transformations in the investigated system is determined by a change in the local concentration of the metalloid during its interstitial diffusion and corresponds to peculiarities of the phase equilibrium diagram of the Fe-O binary system.
$^1$Faculty of Physics, Moscow State University, Moscow, 119991, Russia
$^2$Institute of Nuclear Physics, National Nuclear Center, Almaty, 050032, Kazakhstan
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