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Plasma parameters in dual-camera low power inductive RF discharge with external magnetic field

A.K.Petrov, K.V.Vavilin, G.P.Kozlov, E.A.Kralkina, P.A.Nekliudova, A.N.Nikonov, V.B.Pavlov

Moscow University Physics Bulletin 2015. 15. N 6. P. 527

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Annotation

The results from studying a dual-camera inductive radio-frequency (RF) discharge that was placed in an external magnetic field are presented. The operating conditions were as follows: an argon pressure of 5 × 10$^{–5}$–6 × 10$^{–2}$ Torr, an external magnetic field strength of 0–60 G, and an RF generator power supply of 25–300 W. During the experiment the resonant RF power consumption and the correspondence between the local power-consumption maxima and spatial maxima of the plasma concentration as a function of the external magnetic field were observed. The comparison of the experimental results with the results of the mathematical simulation indicates that the resonant character of the discharge is associated with the excitation of helicons and Trivelpiece–Gould waves.

Received: 2015 April 10
Approved: 2016 January 22
PACS:
52.35.Hr Electromagnetic waves
52.50.Dg Plasma sources
52.50.Qt Plasma heating by radio-frequency fields; ICR, ICP, helicons
Rissian citation:
А.К.Петров, К.В.Вавилин, Г.П.Козлов, Е.А.Кралькина, П.А.Неклюдова, А.М.Никонов, В.Б.Павлов.
Параметры плазмы в ВЧ индуктивном двухкамерном источнике малой мощности при наличие внешнего магнитного поля.
Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 2015. № 6. С. 98.
Authors
A.K.Petrov, K.V.Vavilin, G.P.Kozlov, E.A.Kralkina, P.A.Nekliudova, A.N.Nikonov, V.B.Pavlov
Department of Physics, Moscow State University, Moscow, 119991 Russia
Issue 6, 2015

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