A Comparison on Absorption Coefficients for Secondary Electron Emission Obtained from Two Different Formulas

In this work, the absorption coefficients for secondary electron emission, and, that appeared respectively in the two different formulas, and were derived with a standard deviation rate analysis method based on a Monte Carlo simulated secondary electron yield. Both the energy dissipation in depth for primary electrons, and the depth distribution for the number of secondary electrons including cascade electrons, were obtained by the same Monte Carlo method, in which the discrete inelastic scattering model was employed. The calculation results for Cu and Mg show that the -curve differs significantly from the -curve, and thus as well as from , for varied incidence angles (00-800) and low-energy primary electrons (up to 3 keV). The absorption coefficient -values derived from a realistic depth distribution of cascade secondary electrons, , then describe more accurately the nature of attenuation behavior of secondary electrons than -values that associated with the approximate formula.