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Improving the Accuracy of Broad-Band Monitoring of Optical Coating Deposition

T. F. Isaev, I. V. Kochikov, D. V. Lukyanenko, A. V. Tikhonravov, A. G. Yagola

Moscow University Physics Bulletin 2018. 73. N 4. P. 382

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Annotation

A method for improving the accuracy of the broad-band monitoring of the process of depositing optical coatings is proposed. The method is based on determining the actual set of thicknesses of deposited layers in the deposition process. The effectiveness of the proposed approach is demonstrated in a series of model numerical experiments using a simulator of deposition process.

Received: 2017 September 4
Approved: 2019 January 24
PACS:
42.25.Hz Interference
Rissian citation:
Т. Ф. Исаев, И. В. Кочиков, Д. В. Лукьяненко, А. В. Тихонравов, А. Г. Ягола.
Повышение точности широкополосного контроля процесса напыления оптических покрытий.
Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 2018. № 4. С. 45.
Authors
T. F. Isaev, I. V. Kochikov, D. V. Lukyanenko, A. V. Tikhonravov, A. G. Yagola
$^1$Department of General Nuclear Physics, Faculty of physics, Lomonosov Moscow State University
Issue 4, 2018

Moscow University Physics Bulletin

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