Annotation
A method for improving the accuracy of the broad-band monitoring of the process of depositing optical coatings is proposed. The method is based on determining the actual set of thicknesses of deposited layers in the deposition process. The effectiveness of the proposed approach is demonstrated in a series of model numerical experiments using a simulator of deposition process.
Received: 2017 September 4
Approved: 2019 January 24
PACS:
42.25.Hz Interference
© 2016 Publisher M.V.Lomonosov Moscow State University
Authors
T. F. Isaev, I. V. Kochikov, D. V. Lukyanenko, A. V. Tikhonravov, A. G. Yagola
$^1$Department of General Nuclear Physics, Faculty of physics, Lomonosov Moscow State University
$^1$Department of General Nuclear Physics, Faculty of physics, Lomonosov Moscow State University
Science News of the Faculty of Physics, Lomonosov Moscow State University
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