Annotation
The accuracy of the determination of the parameters of the first coating layer is critical for the accuracy of monitoring of the entire deposition of optical coatings. The paper presents a nonlocal algorithm for the analysis of optical monitoring data, which makes it possible to compose a more accurate model of the layer. The capabilities of the new nonlocal algorithm are demonstrated by studying the parameters of the first coating layer formed by niobium oxide, which is one of the main film-forming materials with a high refractive index.
Received: 2021 June 8
Approved: 2022 January 10
PACS:
42.25.Hz Interference
© 2016 Publisher M.V.Lomonosov Moscow State University
Authors
T. F. Isaev$^{1,2}$, I. S. Lagutin$^{1,2,3}$, A. A. Lagutina$^{1,2,3}$, D. V. Lukyanenko$^{1,2,3}$, O. F. Prosovskiy$^4$, A. V. Tikhonravov$^{2,3}$, A. G. Yagola$^{1,2}$
$^1$Department of Mathematics, Faculty of Physics, Lomonosov Moscow State University.\
$^2$Research Computing Center, Lomonosov Moscow State University\
$^3$Moscow Center of Fundamental and Applied Mathematics\
$^4$JSC ORPE <<Technologiya>>
$^1$Department of Mathematics, Faculty of Physics, Lomonosov Moscow State University.\
$^2$Research Computing Center, Lomonosov Moscow State University\
$^3$Moscow Center of Fundamental and Applied Mathematics\
$^4$JSC ORPE <<Technologiya>>