Regular Article

Determination of the parameters of the first layer in optical coating deposition with broad-band optical monitoring

T. F. Isaev$^{1,2}$, I. S. Lagutin$^{1,2,3}$, A. A. Lagutina$^{1,2,3}$, D. V. Lukyanenko$^{1,2,3}$, O. F. Prosovskiy$^4$, A. V. Tikhonravov$^{2,3}$, A. G. Yagola$^{1,2}$

Moscow University Physics Bulletin 2021. N 5. BPHM356

Article

Annotation

The accuracy of the determination of the parameters of the first coating layer is critical for the accuracy of monitoring of the entire deposition of optical coatings. The paper presents a nonlocal algorithm for the analysis of optical monitoring data, which makes it possible to compose a more accurate model of the layer. The capabilities of the new nonlocal algorithm are demonstrated by studying the parameters of the first coating layer formed by niobium oxide, which is one of the main film-forming materials with a high refractive index.

Received: 2021 June 8

Approved: 2022 January 10

DOI: 10.3103/S002713492105009X

PACS:

42.25.Hz Interference

Authors

T. F. Isaev$^{1,2}$, I. S. Lagutin$^{1,2,3}$, A. A. Lagutina$^{1,2,3}$, D. V. Lukyanenko$^{1,2,3}$, O. F. Prosovskiy$^4$, A. V. Tikhonravov$^{2,3}$, A. G. Yagola$^{1,2}$
$^1$Department of Mathematics, Faculty of Physics, Lomonosov Moscow State University.\
$^2$Research Computing Center, Lomonosov Moscow State University\
$^3$Moscow Center of Fundamental and Applied Mathematics\
$^4$JSC ORPE <<Technologiya>>

Issue 5, 2021

Moscow University Physics Bulletin

Science News of the Faculty of Physics, Lomonosov Moscow State University

This new information publication, which is intended to convey to the staff, students and graduate students, faculty colleagues and partners of the main achievements of scientists and scientific information on the events in the life of university physicists.