Regular Article

Theory of the observation of cathodoluminescence in a stroboscopic scanning electron microscope

G.V. Spivak, L.F. Komolova, G.V. Saparin, V.V. Mazur, and V.A. Cherepenin

Moscow University Physics Bulletin 1976. 31. N 4. P. 46

Article

Annotation

The quantitative basis of a method of increasing the spatial resolution of a cathodoluminescent image in a scanning electron microscope using a three-dimens ional model is presented. An improvement in resolution by a factor of five is obtained in specimens of CdS and ZnSe semiconductors.

Authors

G.V. Spivak, L.F. Komolova, G.V. Saparin, V.V. Mazur, and V.A. Cherepenin
Department of Electronics

Issue 4, 1976

Moscow University Physics Bulletin

Science News of the Faculty of Physics, Lomonosov Moscow State University

This new information publication, which is intended to convey to the staff, students and graduate students, faculty colleagues and partners of the main achievements of scientists and scientific information on the events in the life of university physicists.