Annotation
The results of experimental investigation of the angular and energy distributions of secondary ions sputtered from aluminum polycrystals under argon ion bombardment are presented. Some conclusions have been drawn concerning the applicability of various sputtering and ion emission models.
© 2016 Publisher M.V.Lomonosov Moscow State University
Authors
V.M. Bukhanov, K.F. Minnebaev, I.F. Urazgil'din, V.S. Chernysh
Department of Physical Electronics, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia
Department of Physical Electronics, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia
Science News of the Faculty of Physics, Lomonosov Moscow State University
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