Faculty of Physics
M.V.Lomonosov Moscow State University
Brief Report

Electrophysical method of pore size determination in porous silicon

V.M. Demidovich, G.B. Demidovich, S.N. Kozlov, A.A. Petrov

Moscow University Physics Bulletin 1998. 53. N 1. P. 74

  • Article

A method of pore size determination in a porous system based on its conductivity measurement with pores filled with a liquid conducting adsorbate is proposed. To evaluate the method, the silicon pore size is estimated using the data on the system conductivity in vapors of water and alcohol. The obtained results are in good agreement with pore size estimates obtained by adsorption methods.

Rissian citation:
В.М. Демидович, Г.Б. Демидович, С.Н. Козлов, А.А. Петров.
Электрофизический метод определения размеров пор в пористом кремнии.
Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 1998. № 1. С. 55.
V.M. Demidovich, G.B. Demidovich, S.N. Kozlov, A.A. Petrov
Department of General Physics and Molecular Electronics, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia
Issue 1, 1998

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