Steady flow of three-dimensional compressible isothermal flows in long microchannels has been considered with due regard for molecular effects. Using the expansions of the Navier-Stokes equation in terms of a small parameter (channel height-to-length ratio), the solutions for streamlined velocity, pressure distribution and mass flow have been obtained. The influence of compressibility and rarefaction effects on gas flow dynamics as well as the influence of the flow slipping on the tracer scale along the channel walls on pressure, velocity profiles, and mass transfer have been studied.
Department of Optics and Spectroscopy, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia
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