Annotation
A new approach has been suggested for solving the problems of analysis and interpretation of video signals of a scanning electron microscope (SEM) and other microprobe devices based on a morphological analysis of images, the theory of calculating and measuring systems of superhigh resolution and a quantitative model of beam-solid interaction, which takes account of various interaction channels. The efficiency of applying the suggested methods has been shown.
© 2016 Publisher M.V.Lomonosov Moscow State University
Authors
S.S. Borisov, E.A. Grachev, D.M. Ustinin, E.A. Cheremukhin, A.I. Chulichkov
Department of Computer Methods of Physics, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia
Department of Computer Methods of Physics, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia
Science News of the Faculty of Physics, Lomonosov Moscow State University
This new information publication, which is intended to convey to the staff, students and graduate students, faculty colleagues and partners of the main achievements of scientists and scientific information on the events in the life of university physicists.