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Fraunhofer diffraction on a polygon and calculation of binary mask images

G. V. Belokopytov, Yu. V. Ryzhikova

Moscow University Physics Bulletin 2009. 64. N 2. P. 146

  • Article
Annotation

A simple analytical formula for the spectrum of spatial harmonic components of a diffracted field is derived. It is used for construction of an effective algorithm of image calculation in photolithography.

PACS:
42.30.Kq Fourier optics
Rissian citation:
Г. В. Белокопытов, Ю. В. Рыжикова.
Дифракция Фраунгофера на многоугольнике и расчет изображений бинарных масок.
Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 2009. № 2. С. 41.
Authors
G. V. Belokopytov, Yu. V. Ryzhikova
Department of Oscillation Physics, Faculty of Physics, Moscow State University, Moscow, 119992, Russia
Issue 2, 2009

Moscow University Physics Bulletin

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