Regular Article

Fraunhofer diffraction on a polygon and calculation of binary mask images

G. V. Belokopytov, Yu. V. Ryzhikova

Moscow University Physics Bulletin 2009. 64. N 2. P. 146

Article

Annotation

A simple analytical formula for the spectrum of spatial harmonic components of a diffracted field is derived. It is used for construction of an effective algorithm of image calculation in photolithography.

PACS:

42.30.Kq Fourier optics

Authors

G. V. Belokopytov, Yu. V. Ryzhikova
Department of Oscillation Physics, Faculty of Physics, Moscow State University, Moscow, 119992, Russia

Issue 2, 2009

Moscow University Physics Bulletin

Science News of the Faculty of Physics, Lomonosov Moscow State University

This new information publication, which is intended to convey to the staff, students and graduate students, faculty colleagues and partners of the main achievements of scientists and scientific information on the events in the life of university physicists.