Annotation
The physical properties of a new modification of RF discharge-hybrid RF discharge (HRFD)-are studied experimentally. A HRFD is sustained by both the vortical RF electric field and the potential one generated by the inductive and capacitive channels of the discharge. The inductive channel effect on the parameters of the space-charge electrode sheaths, which determine the capacitive component of the physical mechanism of a HRFD, is discussed.
Received: 2009 September 17
Approved: 2010 May 28
PACS:
52.50.-b Plasma production and heating
52.80.Pi High-frequency and RF discharges
52.80.-s Electric discharges
52.80.Pi High-frequency and RF discharges
52.80.-s Electric discharges
© 2016 Publisher M.V.Lomonosov Moscow State University
Authors
A.F. Alexandrov, K.V. Vavilin, E.A. Kralkina, V.B. Pavlov, V.P. Savinov, V.G. Yakunin
Department of Physical Electronics, Faculty of Physics, Moscow State University, Moscow, 119991, Russia
Department of Physical Electronics, Faculty of Physics, Moscow State University, Moscow, 119991, Russia
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