Faculty of Physics
M.V. Lomonosov Moscow State University
Brief Report

Studies of the logical state of integrated microcircuits by atomic force microscopy

A.M. Tagachenkov

Moscow University Physics Bulletin 2010. 65. N 3. P. 217

  • Article

The logical state of the memory cells in a nondestructive microcontroller was determined and analyzed by atomic-force microscopy. An effective optimal recording procedure of the electric potential on the microchip surface was created.

Received: 2009 December 14
Approved: 2010 June 23
07.79.Lh Atomic force microscopes
42.82.Cr Fabrication techniques; lithography, pattern transfer
85.40.-e Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology
Rissian citation:
А.М. Тагаченков.
Исследования логического состояния интегральных микросхем методами атомной силовой микроскопии.
Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 2010. № 3. С. 59.
A.M. Tagachenkov
Institute of Nanotechnologies in Microelectronics, Russian Academy of Sciences, Moscow, 119991, Russia
Issue 3, 2010

Moscow University Physics Bulletin

Science News of the Faculty of Physics, Lomonosov Moscow State University

This new information publication, which is intended to convey to the staff, students and graduate students, faculty colleagues and partners of the main achievements of scientists and scientific information on the events in the life of university physicists.