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Studies of the logical state of integrated microcircuits by atomic force microscopy

A.M. Tagachenkov

Moscow University Physics Bulletin 2010. 65. N 3. P. 217

  • Article
Annotation

The logical state of the memory cells in a nondestructive microcontroller was determined and analyzed by atomic-force microscopy. An effective optimal recording procedure of the electric potential on the microchip surface was created.

Received: 2009 December 14
Approved: 2010 June 23
PACS:
07.79.Lh Atomic force microscopes
42.82.Cr Fabrication techniques; lithography, pattern transfer
85.40.-e Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology
Rissian citation:
А.М. Тагаченков.
Исследования логического состояния интегральных микросхем методами атомной силовой микроскопии.
Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 2010. № 3. С. 59.
Authors
A.M. Tagachenkov
Institute of Nanotechnologies in Microelectronics, Russian Academy of Sciences, Moscow, 119991, Russia
Issue 3, 2010

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