Annotation
The logical state of the memory cells in a nondestructive microcontroller was determined and analyzed by atomic-force microscopy. An effective optimal recording procedure of the electric potential on the microchip surface was created.
Received: 2009 December 14
Approved: 2010 June 23
PACS:
07.79.Lh Atomic force microscopes
42.82.Cr Fabrication techniques; lithography, pattern transfer
85.40.-e Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology
42.82.Cr Fabrication techniques; lithography, pattern transfer
85.40.-e Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology
Rissian citation:
А.М. Тагаченков.
Исследования логического состояния интегральных микросхем
методами атомной силовой микроскопии. Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 2010. № 3. С. 59.
© 2016 Publisher M.V.Lomonosov Moscow State University
Authors
A.M. Tagachenkov
Institute of Nanotechnologies in Microelectronics, Russian Academy of Sciences, Moscow, 119991, Russia
Institute of Nanotechnologies in Microelectronics, Russian Academy of Sciences, Moscow, 119991, Russia
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