The Effect of Alloying on the Structure and Peculiarities of Tribological Behavior of Vacuum-Deposited Diamond-Like Coatings

In this work, we report the results of a study of the atomic and crystalline structures, phase and chemical compositions and tribological properties of DLC coatings deposited by plasma-assisted (PA) CVD (a-C:H:Si and a-C:H:Si:Mo) and magnetron reactive sputtering (a-C:H:Cr). The a-C:H:Si:Mo coatings revealed the formation of ultra-dispersed inclusions of either molybdenum carbides or silicides, whereas no such inclusions were found in the a-C:H:Si compound. The a-C:H:Cr coatings that were deposited in an acetylene–nitrogen gas mixture exhibited a nanocomposite structure composed of chromium, its carbide and nitride phases. The tribological tests showed that the DLC coatings with silicon and silicon–molybdenum have a high friction coefficient and a low working performance, while the chromium-containing coatings have high levels of their mechanical and tribological characteristics, making them promising materials for operation under high contact pressures.