An error self-compensation mechanism is investigated for use during the deposition of optical coatings with broadband optical monitoring. The correlation of thickness errors caused by monitoring procedure is mathematically described. It is shown that this correlation of errors may result in the effect of selfcompensation of errors.
02.70.-c Computational techniques; simulations
$^1$Lomonosov Moscow State University, Research Computer Center
$^2$Max Planck Institute of Quantum Optics, Hans-Kopfermann Str. 1, 85748, Garching, Germany
$^3$Scientific Research Institution «Lutch», Zeleznodorozhnaya 24, Podolsk, Moscow, Russia
$^4$Department of Mathematics, Faculty of physics, Lomonosov Moscow State University