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An Error Self-Compensation Mechanism for Deposition of Optical Coatings with Broadband Optical Monitoring

A.V.Tikhonravov$^1$, I.V. Kochikov$^1$, M.K.Trubetskov$^2$, S.A. Sharapova$^1$, V.G. Zhupanov$^3$, A.G. Yagola$^4$

Moscow University Physics Bulletin 2017. 72. N 3. P. 274

  • Article
Annotation

An error self-compensation mechanism is investigated for use during the deposition of optical coatings with broadband optical monitoring. The correlation of thickness errors caused by monitoring procedure is mathematically described. It is shown that this correlation of errors may result in the effect of selfcompensation of errors.

Received: 2016 November 11
Approved: 2017 August 23
PACS:
42.79.Wc Optical coatings
02.70.-c Computational techniques; simulations
Rissian citation:
А.В. Тихонравов, И.В. Кочиков, М.К.Трубецков, С.А. Шарапова, В.Г. Жупанов, А.Г. Ягола.
Механизм самокомпенсации ошибок при широкополосном оптическом контроле процесса напыления многослойных покрытий.
Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 2017. № 3. С. 55.
Authors
A.V.Tikhonravov$^1$, I.V. Kochikov$^1$, M.K.Trubetskov$^2$, S.A. Sharapova$^1$, V.G. Zhupanov$^3$, A.G. Yagola$^4$
$^1$Lomonosov Moscow State University, Research Computer Center
$^2$Max Planck Institute of Quantum Optics, Hans-Kopfermann Str. 1, 85748, Garching, Germany
$^3$Scientific Research Institution «Lutch», Zeleznodorozhnaya 24, Podolsk, Moscow, Russia
$^4$Department of Mathematics, Faculty of physics, Lomonosov Moscow State University
Issue 3, 2017

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