A Comparison on Absorption Coefficients for Secondary Electron Emission Obtained from Two Different Formulas

In this work, the absorption coefficients for secondary electron emission, and , that appeared respectively in the two different formulas, and , were derived with a standard deviation rate analysis method based on a Monte Carlo simulated secondary electron yield， . Both the energy dissipation in depth for primary electrons, , and the depth distribution for the number of secondary electrons including cascade electrons, , were obtained by the same Monte Carlo method, in which the discrete inelastic scattering model was employed. The calculation results for Cu and Mg show that the -curve differs significantly from the -curve, and thus as well as from , for varied incidence angles (00-800) and low-energy primary electrons (up to 3 keV). The absorption coefficient -values derived from a realistic depth distribution of cascade secondary electrons, , then describe more accurately the nature of attenuation behavior of secondary electrons than -values that associated with the approximate formula.