It is shown that electron bombardment can be used to form composite dielectric and resistive coatings on a polymer base that are localized in the area in which the electron beam interacts with the backing. The filming parameters of silicon monoxide and silver on a polymer backing are determined with and without electron beaming. Several materials in the class of silicon-carbon heterocyclics are studied with dielectric and metallic components introduced into them in metal - dielectric - metal structures.
Department of Electronics
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