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Angular and energy distributions of secondary ions sputtered from polycristals

V.M. Bukhanov, K.F. Minnebaev, I.F. Urazgil'din, V.S. Chernysh

Moscow University Physics Bulletin 1990. 45. N 1. P. 28

  • Article
Annotation

The results of experimental investigation of the angular and energy distributions of secondary ions sputtered from aluminum polycrystals under argon ion bombardment are presented. Some conclusions have been drawn concerning the applicability of various sputtering and ion emission models.

Authors
V.M. Bukhanov, K.F. Minnebaev, I.F. Urazgil'din, V.S. Chernysh
Department of Physical Electronics, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia
Issue 1, 1990

Moscow University Physics Bulletin

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