Annotation
The experimental investigations conducted have shown that the scintillation detectors used in scanning electron microscopy for the registration of back.scattered electron fluxes differ noticeably in the efficiency of detection by different regions of their active part.
Rissian citation:
Р.Н. Бирченко, Э.И. Рау, М.Н. Филиппов.
Исследование эффективности сцинтилляционных детекторов обратно рассеянных электронов в РЭМ. Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 2000. № 2. С. 28.
© 2016 Publisher M.V.Lomonosov Moscow State University
Authors
R.N. Birchenko, E.I. Rau, M.N. Filippov
Department of Physical Electronics, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia
Department of Physical Electronics, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia
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