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Studying the efficiency of scintillation detectors for back-scattered electrons in SEM

R.N. Birchenko, E.I. Rau, M.N. Filippov

Moscow University Physics Bulletin 2000. 55. N 2. P. 35

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Annotation

The experimental investigations conducted have shown that the scintillation detectors used in scanning electron microscopy for the registration of back.scattered electron fluxes differ noticeably in the efficiency of detection by different regions of their active part.

Rissian citation:
Р.Н. Бирченко, Э.И. Рау, М.Н. Филиппов.
Исследование эффективности сцинтилляционных детекторов обратно рассеянных электронов в РЭМ.
Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 2000. № 2. С. 28.
Authors
R.N. Birchenko, E.I. Rau, M.N. Filippov
Department of Physical Electronics, Faculty of Physics, Moscow State University, Leninskie Gory, Moscow, 119992, Russia
Issue 2, 2000

Moscow University Physics Bulletin

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