Annotation
Energy distribution spectra of backscattered electrons in the range 5–25 keV are obtained experimentally. An inverse problem of the reconstruction of the true electron spectrum is solved taking into account the instrument response function of the spectrometer; on the basis of the obtained solution, we specify functions of the real energy distribution of the electrons backscattered from homogeneous and layered samples.
Received: 2009 May 8
Approved: 2009 October 9
PACS:
02.30.Zz Inverse problems
© 2016 Publisher M.V.Lomonosov Moscow State University
Authors
A.V. Bolotina$^1$, F.A. Luk’yanov$^2$, E.I. Rau$^2$, R.A. Sennov$^2$, A.G. Yagola$^1$
$^1$Department of Mathematics, Faculty of Physics, Moscow State University, Moscow, 119991, Russia
$^2$Department of Physical Electronics, Faculty of Physics, Moscow State University, Moscow, 119991, Russia
$^1$Department of Mathematics, Faculty of Physics, Moscow State University, Moscow, 119991, Russia
$^2$Department of Physical Electronics, Faculty of Physics, Moscow State University, Moscow, 119991, Russia