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Localization of an ultrathin buried Fe layer in a multilayer structure Nb/Fe/[Mo/Si]$_{40}$/SiO$_2$ by means of X-ray standing waves

M.A. Andreeva$^1$, A.D. Gribova$^1$, E.E. Odintsova$^1$, M.M. Borisov$^2$, M.V. Kovalchuk$^2$, E.Kh. Mukhamedzhanov$^2$

Moscow University Physics Bulletin 2009. 64. N 4. P. 437

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Annotation

An analysis of the influence of standing waves on the angular dependencies of the fluorescent yield from an ultrathin iron layer buried inside a multilayer structure of Nb(50 nm)/Fe(3.9 nm)/[Si/Mo(6.77 nm)]$_{40}$/SiO$_2$ is presented. These angular dependencies of reflectivity and FeK α-fluorescence yield were measured at the Station for high-precision X-ray optics (HPXO) of the Kurchatov Center for Synchrotron Radiation and Nanotechnology. The measured data was analyzed with the help of our FLUO software package. As a result of the complex treatment of reflectivity and Fe fluorescent yield data, the depth profile for iron atomic density was restored.

Received: 2009 January 30
Approved: 2009 September 23
PACS:
68.49.Uv X-ray standing waves
68.65.Ac Multilayers
78.70.En X-ray emission spectra and fluorescence
Authors
M.A. Andreeva$^1$, A.D. Gribova$^1$, E.E. Odintsova$^1$, M.M. Borisov$^2$, M.V. Kovalchuk$^2$, E.Kh. Mukhamedzhanov$^2$
$^1$Faculty of Physics, Solid State Physics Department, Moscow State University, Leninskiye Gory, Moscow, 119991, Russia.
$^2$Russian Research Centre Kurchatov Institute, pl. Kurchatova 1, Moscow, 123182, Russia
Issue 4, 2009

Moscow University Physics Bulletin

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