This paper presents the results of investigating the power absorption mechanism of an inductive RF discharge plasma. Dependences of the frequency of elastic electron collisions with inert gas atoms (helium, neon, argon, and krypton) on the pressure are given. In the frequency range of •10$^6$–3•10$^7$ s$^{-1}$, an equivalent plasma resistance and the power input into the plasma are determined by the values of collision frequency and electron density within a skin layer and do not depend on the type of gas within the limits of experimental error. Upon reaching the electron temperature of -1 eV, the energy of the main part of electrons lies in the range of Ramsauer’s minimum for elastic cross section. This leads to a decreasing elastic-collision frequency in heavy inert gases as compared to helium.
Department of Physics, Moscow State University, Moscow, 119991, Russia
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