The characteristic investigation of spray coatedW incorporated in oxide thin films
G. Turgut, E.F. Keskenler
Вестн. Моск. ун-та. Сер. 3. Физ. Астрон. 2015. № 5.
W doped tin oxide (TO) thin films were prepared by spray pyrolysis with different tungsten concentrations. The films have been found to be polycrystalline nature with tetragonal crystal structure and preferential growth along the (301) and (211) planes. From Energy Dispersive X-ray analysis, it is seen that the concentration of W in the TO films is slightly more than that
of starting solution. Polyhedron-like and small rod-like grains have been observed in the Scanning Electron Microscope images for undoped, 1,2,3 at.% W doped and 4, 5 at.% W doped TO films, respectively. The films, deposited with 3 at.% W, exhibited lowest values of sheet resistance (44.67 Ω) and resistivity (3.685x10-3 Ω.cm) and the highest value of figure of merit (75.74x10-5 Ω-1). The direct optical band gap (Eg) has increased from 3.84 eV (undoped) to 3.91 eV with 3 at.% W doping concentration. Показать Аннотацию